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Laser scribing on HOPG for graphene stamp printing on silicon wafer

机译:在HOpG上激光划线,用于在硅晶片上印刷石墨烯

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摘要

Highly oriented pyrolytic graphite (HOPG) was scribed by pulsed laser beam toproduce square patterns. Patterning of HOPG surface facilitates the detachmentof graphene layers during contact printing. Direct HOPG-to-substrate andglue-assisted stamp printing of a few-layers graphene was compared. Printedgraphene sheets were visualized by optical and scanning electron microscopy.The number of graphene layers was measured by atomic force microscopy.Glue-assisted stamp printing allows printing relatively large graphene sheets(40x40 microns) onto a silicon wafer, which can be important formicroelectronics fabrication. The presented method is easier to implement andis more flexible than the majority of existing ways of placing graphene sheetsonto a substrate.
机译:用脉冲激光束刻划高取向的热解石墨(HOPG)以产生正方形图案。 HOPG表面的图案化有助于在接触印刷期间石墨烯层的分离。比较了几层石墨烯的直接HOPG到基材和胶辅助印模的印刷。印刷的石墨烯片通过光学和扫描电子显微镜观察,石墨烯层的数量通过原子力显微镜测量。胶辅助印模印刷允许在硅晶片上印刷相对较大的石墨烯片(40x40微米),这对于微电子制造至关重要。所提出的方法比将石墨烯片层放置到衬底上的大多数现有方式更易于实现并且更灵活。

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